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Electrochemical treatment of chemical mechanical polishing wastewater: removal of fluoride — sludge characteristics — operating cost

by Noreddine Ghaffour
DOI: https://doi.org/10.1016/j.desal.2007.01.191

Abstract

The aim of this paper is to propose an efficient and low-co st treatment of chemical mechanical polishing
wastewater process based on electroco agulation with iron bipolar electrodes. The performance of a pilot scale
electrochemical reactor equipped with iron bipolar electrodes and an anode active area surface of about 170 cm2
was studied. In addition, sludge settling after electrocoagulation were characterized.
The pilot study yield promising results, suggesting that further in-depth development study is worth to be
considered in a future work.

Keywords

Electrocoagulation CMP Wastewater Bipolar electrodes Lime

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